作者: Wei Gao , Qilong Wei , Jianwei Ji , Pengfei Sun , Fang Ji
DOI: 10.1364/OE.27.006268
关键词: Jet (fluid) 、 Materials science 、 Deformation (meteorology) 、 Abrasive 、 Dissolution 、 Optics 、 Figuring 、 Composite material 、 Magnetorheological finishing 、 Chemical-mechanical planarization 、 Polishing
摘要: Traditional KDP polishing methods, such as magnetorheological finishing (MRF), ion-beam figuring (IBF), and chemical mechanical (CMP), are limited by either hard-to-remove residual particles, unavoidable heating effect, or applicability that is restricted to large-sized KDP. The abrasive-free jet (AFJP) regarded a promising method can circumvent the above issues. AFJP makes use of thermodynamically kinetically stable ionic liquid (IL) microemulsion contains nanometer range water droplets evenly dispersed in non-aqueous carrier liquid. sprayed out nanoscale remove material through dissolution. In this paper, normal impinging droplet on surface investigated. And then materials removal model proposed for droplets. This considers two major modes, namely deformation compressing restoring slipping process. Finally, spot experiments were conducted validate veracity. fits well with simulation experimental results which further suggest AFJP’s feasibility. provides good explanation mechanism.