作者: Xu Wang , Hang Gao , Julong Yuan
DOI: 10.1016/J.PRECISIONENG.2020.04.014
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摘要: Abstract A single crystal of potassium dihydrogen phosphate (KH2PO4, KDP), which possesses unique excellent non-linear electro-optical properties, is currently the only material suitable for electro-optic switches and high power laser-frequency conversion applications in laser-induced inertial confinement fusion. However, KDP crystals are difficult to produce because their inherent softness, brittleness, water-solubility, as well strong anisotropy temperature sensitivity. Obtaining high-quality near-lossless elements an issue that should be solved urgently. In this study, ultra-precision numerical control polishing method based on water dissolution principle was introduced achieve a controllable removal. small tool used process large surface, accurate influence functions required deterministic fabrication surface. order quantify critical parameters (e.g., speed, pressure, content, directions revolution rotation) removal rate distribution, function model established Preston equation. The then modified experiments, its accuracy verified. This lays foundation crystals. very smoothed surface with (peak-to-valley value below 0.4 λ) low roughness (Ra 1.598 nm) could indeed obtained by using model. research also applicable other water-soluble materials.