Fine tuning of micropillar cavity modes through repetitive oxidations

作者: Donald J. Suntrup , Tuan-Ahn Truong , Morten P. Bakker , Dirk Bouwmeester , Pierre M. Petroff

DOI: 10.1364/OL.38.003308

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摘要: Repetitive wet thermal oxidations of a tapered oxide aperture in micropillar structure are demonstrated. After each oxidation step the confined optical modes analyzed at room temperature. Three regimes identified. First, confinement increases when oxidizes toward center. Then, cavity shift by more than 30 nm taper starts to oxidize through center, leading decrease path length. Finally, resonance frequency levels off is oxidized all way micropillar, but with high quality factor remain. This repetitive technique therefore enables precise control volume or wavelength.

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