Driving calibration apparatus of electrostatic mems scanning mirror and driving calibration method therefof

摘要: The invention provides a driving calibration apparatus of an electrostatic MEMS scanning mirror and method thereof includes the following steps. Different reference voltages are sequentially set to drive plane swing. Projection positions on projected surface corresponding that laser beam projects determined. A lookup table is established according projection positions. Calibrated ideal determined table. pane driven swing calibrated voltages.