Device and Method for Micro-Electro-Mechanical-System Photonic Switch
作者： Dominic John Goodwill , Alan Frank Graves
DOI:
关键词:
摘要: In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes first plurality of collimators including collimator configured to receive traffic optical beam having wavelength and control wavelength, where focal length the at is different than second wavelength. The MEMS also mirror array optically coupled collimators, mirrors integrated on substrate photodiodes substrate, are disposed in interstitial spaces between mirrors.
lens.org 参考文章(38)
Wolfram Doetzel, Richard Kiehnscherf, Joachim Markert, Micromechanical optical motion device has movable plate with driven electrode/permanent magnetic volume loosely joined to base plate via arrangement for setting distance between them ,(1999)
Jerry I. Dadap, Lih Y. Lin, Nicolas H. Bonadeo, Optical switch and method for aligning optical switch components ,(2001)
Atsushi Kazama, Kazuyuki Fukuda, Masaya Horino, Yasuhiro Itou, Optical switch and optical switch system ,(2004)
Dan Blumenthal, David Welsh, John E. Bowers, Roger Jonathan Helkey, Chandrasekhar Pusarla, John Chong, Optical switch having switch mirror arrays controlled by scanning beams ,(2001)
Yee-Chung Fu, MEMS scanning mirror with distributed hinges and multiple support attachments Journal of the Acoustical Society of America. ,vol. 120, pp. 1163- ,(2003) , 10.1121/1.2355934
Fusao Shimokawa, Shuichiro Inagaki, Makoto Murakami, Johji Yamaguchi, Kunihiko Sasakura, Katsuyuki Machida, Shingo Uchiyama, Hirofumi Morita, Makoto Sato, Hiromu Ishii, Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method ,(2012)
V.A. Aksyuk, S. Arney, N.R. Basavanhally, D.J. Bishop, C.A. Bolle, C.C. Chang, R. Frahm, A. Gasparyan, J.V. Gates, R. George, C.R. Giles, J. Kim, P.R. Kolodner, T.M. Lee, D.T. Neilson, C. Nijander, C.J. Nuzman, M. Paczkowski, A.R. Papazian, F. Pardo, D.A. Ramsey, R. Ryf, R.E. Scotti, H. Shea, M.E. Simon, 238 x 238 micromechanical optical cross connect IEEE Photonics Technology Letters. ,vol. 15, pp. 587- 589 ,(2003) , 10.1109/LPT.2003.809261
P.B. Chu, I. Brener, Chuan Pu, Shi-Sheng Lee, J.I. Dadap, Sangtae Park, K. Bergman, N.H. Bonadeo, T. Chau, Ming Chou, R.A. Doran, R. Gibson, R. Harel, J.J. Johnson, C.D. Lee, D.R. Peale, Bo Tang, D.T.K. Tong, Ming-Ju Tsai, Qi Wu, W. Zhong, E.L. Goldstein, L.Y. Lin, J.A. Walker, Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 14, pp. 261- 273 ,(2005) , 10.1109/JMEMS.2004.839827
J. Kim, C.J. Nuzman, B. Kumar, D.F. Lieuwen, J.S. Kraus, A. Weiss, C.P. Lichtenwalner, A.R. Papazian, R.E. Frahm, N.R. Basavanhally, D.A. Ramsey, V.A. Aksyuk, F. Pardo, M.E. Simon, V. Lifton, H.B. Chan, M. Haueis, A. Gasparyan, H.R. Shea, S. Arney, C.A. Bolle, P.R. Kolodner, R. Ryf, D.T. Neilson, J.V. Gates, 1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss IEEE Photonics Technology Letters. ,vol. 15, pp. 1537- 1539 ,(2003) , 10.1109/LPT.2003.818653
Takeshi Nanjyo, Seiichi Katoh, Kouichi Ohtaka, Light deflecting method and apparatus efficiently using a floating mirror ,(2007)