Substrate for growing electro-optical single crystal thin film and method of manufacturing the same
作者： Jun Komiyama , Yoshihisa Abe , Shunichi Suzuki , Hideo Nakanishi
DOI:
关键词:
摘要: A substrate 1 for growing an electro-optical single crystal thin film in which two or more layers of buffer 3, 4 , and 5 buffering lattice mismatch between Si BTO are formed on (001) 2 is provided as a can obtain 6 etc. with large size very high quality.
lens.org 参考文章(21)
Howard Branz, David Ginley, Charles Teplin, Method for low-temperature, hetero-epitaxial growth of thin film cSi on amorphous and multi-crystalline substrates and c-Si devices on amorphous, multi-crystalline, and crystalline substrates ,(2005)
Supab Choopun, Wei Yang, Ratnakar D. Vispute, Thirumalai Venkatesan, Mgzno based uv detectors ,(2001)
Yun Soo Kim, Sun Sook Lee, Sung Yong Lee, Process for growing a magnesium oxide film on a silicon (100) substrate coated with a cubic silicon carbide butter layer ,(2000)
Eugene A. Fitzgerald, CONTROLLING THREADING DISLOCATION DENSITIES IN Ge ON Si USING GRADED GeSi LAYERS AND PLANARIZATION ,(1998)
Hideki Satake, Tatsuo Shimizu, Insulating film and electronic device ,(2006)
Manfred Mundbrod-Vangerow, Volker Harle, Dominik Eisert, Berthold Hahn, Hans-Jurgen Lugauer, Stefan Bader, Radiation-emitting semiconductor element and method for producing the same ,(2005)
Sangsub Kim, Shunichi Hishita, Preparation and Characterization of BaTiO3 Thin Films on MgO-buffered Si(100) Substrates by RF Sputtering Journal of Materials Research. ,vol. 12, pp. 1152- 1159 ,(1997) , 10.1557/JMR.1997.0159
C.H Lei, C.L Jia, M Siegert, J Schubert, Ch Buchal, K Urban, Microstructure and orientation relations of BaTiO3/MgO/YSZ multilayers deposited on Si(0 0 1) substrates by laser ablation Journal of Crystal Growth. ,vol. 204, pp. 137- 144 ,(1999) , 10.1016/S0022-0248(99)00158-X
Corey Overgaard, Ravindranath Droopad, Zhiyi Yu, Method for real-time monitoring and controlling perovskite oxide film growth and semiconductor structure formed using the method ,(2001)