Temperature controlling apparatus and method for forming coating layer
作者： Cheng Wei-Chang , Liao Chi-Hung
DOI:
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摘要: A temperature controlling apparatus includes a platen, fluid source, chiller, first conduit and second conduit. The source supplies fluid. chiller is coupled to the cool in cooling temperature. inlet communication with outlet heater that heats from heating heated by dispensed on platen through outlet. different
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