Off-axis laser deposition and characterization of Ba1-xSrxTiO3 thin films

作者: K. Kämmer , B. Holzapfel , H. Hülz , W. Hässler , L. Schultz

DOI: 10.1080/00150199708228354

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摘要: Abstract Thin films of Ba1-xSrxTiO3 were prepared by off-axis laser deposition on MgO (001) and YBa2Cu3O7-δ coated SrTiO3 substrates. X-ray diffraction in Θ-2Θ geometry shows oriented film growth Ba1-xSrxTiO3. The epitaxial was proved pole figures reflection high-energy electron (RHEED) patterns. Atomic force microscopy (AFM) scanning (SEM) used to investigate the temperature dependence surface roughness grain size. Electrical properties measured a Sawyer-Tower circuit integration polarization current. For 800°C an oxygen pressure 0.4 mbar BaTiO3 show remanent about 5 μmC/cm2 at coercive field 55 kV/cm, dielectric constants 320 dissipation factors 0.02. e-T for different Ba-Sr stoichiometries. optical near bulk values.

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