Method for manufacture of a solar cell
作者： Jens Moschner , Ingo Schwirtlich , Thomas Lauinger
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摘要: The invention relates to a method for manufacture of semiconductor component by the formation hydrogenous layer containing silicon on substrate comprising or such as wafer film. In order achieve good surface and volume passivation, it is proposed that during siliceous in form SiN x O y with 0
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