MEMS Torsion Oscillator Magnetic Field Sensor
作者： Xiaolu Yin , Qianqian Jiao , Lu Yuan , Sy-Hwang Liou
DOI: 10.1109/TMAG.2013.2252153
关键词:
摘要: We developed a new sensitive microcantilever torque magnetometer-based magnetic field sensor that can detect changes of few nano-Tesla under ambient conditions. This consists torsion oscillator, fabricated by microelectromechanical systems (MEMS) process, and soft Fe77.5Si7.5B15 wire. paper describes the principle details experimental set-up demonstrates sensitivity be further improved modifying spring constant cantilever.
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