DEVICE FOR MANUFACTURING THIN FILM LAMINATE

摘要: PROBLEM TO BE SOLVED: To provide a device for manufacturing thin film laminate capable of preventing flexible substrate from falling off gripping roller even when the runs back in reverse direction by maintaining height conveyance to suppress lowering substrate, and film-forming enabling change an initial position through film-formation. SOLUTION: The 44b upper end lower is provided between holding roll conveying which rotary-drives sending chamber 10 take-up 70 convey 1, passed electrodes facing plurality chambers form on surface, laminate. In device, includes: right has arbitrary tilt angle clockwise against horizontal direction; counterclockwise mechanism opens/closes these as pair rollers gripping, at intervals while part thereof. COPYRIGHT: (C)2009,JPO&INPIT