DEVICE FOR MANUFACTURING THIN-FILM PHOTOELECTRIC CONVERSION ELEMENT

摘要: PROBLEM TO BE SOLVED: To improve sealing safety and prolong the life of a device by lowering temperature rise an exhaust block seal section for manufacturing thin-film photoelectric conversion element, further productivity high treatment, miniaturize device, lower cost suppressing discharge in block, allover production cost. SOLUTION: A heat shield 27 material 91 is arranged between substrate 1 backside 21a voltage electrode 21 substantially over whole width 21a, with gap 80 parallel flowing gas film-forming to flank 21, shielding electrically connected it so that flows from opening 25 21. An exhausting 90 has partition 92 through-hole blocking flow, vacuum 73 formed though each partitioned 92.