Thin film laminated body manufacturing apparatus and method

摘要: A strip-shape flexible substrate is transported over a long horizontal distance, with its width extending in the vertical direction, position of direction maintained high precision, and films are deposited onto surface. When depositing thin to manufacture film laminated body, at least one pair gripping rollers arranged space between deposition chambers, which grasps an upper-side edge portion oriented installed such that rotation diagonally upward, angle relative transport substrate, by changing force grasp lifts height can be controlled.