Treatment apparatus for flexible substrate

摘要: A position control device ( 21, 5 ) that controls a widthwise of flexible substrate 1 includes: pair upper nip rollers 21 24, 25 an edge portion the substrate, rotating shafts being inclined so rotation direction in nipping thereof faces obliquely upward at slight bias angle (α) with respect to conveying substrate; support mechanism including movable member 26 and fixed 27 can be rotated brought close to, or withdrawn from each other; spring 51 biases, via member, one roller pressing against other 24 rollers; drive means 56 for displacing biasing as adjust pressure rollers. Occurrence sagging wrinkling inhibited, even when strip-like is conveyed over long distance, constant maintained, thereby ensuring high-quality treatment.