A surface and bulk micromachined angular vertical combdrive for scanning micromirrors
作者： W. Piyawattanametha , P. Patterson , M. Wu , D. Hah , H. Toshiyoshi
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摘要: We present a high performance scanning micromirror with angular vertical comb actuators realized by combining MUMPs 3-mask deep-reactive-ion-etching post process. A DC scan angle of /spl plusmn/4/spl deg/ (mechanical) is achieved at 40 V.
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