Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications
作者： Zhili Hao
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摘要: The past two decades has evidenced the tremendous research and development of micro-machined electrostatic torsion micro-mirrors for a wide range applications. Design techniques these devices are significant importance to meet various performance requirements, reduce trial-and-error cycles prototyping time cost. This chapter presents design developing their
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