Steady State Response Simulation of a 2-D Micromirror in Simulink
作者： Oliver Moravčik , Tomas Skulavik , Peter Schreiber
DOI: 10.4028/WWW.SCIENTIFIC.NET/AMR.488-489.1646
关键词:
摘要: Micromirrors fabricated by MEMS technology may be important sensing components in optical tracking systems used many industrial applications. This paper deals with the analytical model of a 2-D gimbal mounted micromirror and simulation steady state response Simulink. The should further its dynamical behavior.
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