Effect of Pressure and Temperature on Microstructure of Self-Assembled Gradient AlxTi1−xN Coatings

摘要: The correlation between structural properties of Al-rich self-assembled nano-lamellar AlxTi1−xN coatings and process parameters used during their chemical vapor deposition (CVD) remains unexplored. For this article, two gradient were prepared by a stepwise increase in temperature pressure the ranges 750–860 °C 1.56 to 4.5 kPa depositions at constant composition gas mixture. cross-sectional analyzed using X-ray nanodiffraction (CSnanoXRD) electron microscopy. Experimental results indicate that variation changes microstructure, grain morphology, elastic strain, nanolamellae’s chemistry bi-layer period. At temperatures ~750–800 pressures 2.5–4.5 kPa, preferably cubic nanolamellar grains are formed, whose microstructure correlates with build-up tensile stresses, which become relaxed coating regions filled nanocrystalline grains. CSnanoXRD superlattice satellite reflections period Al(Ti)N-Ti(Al)N bilayers, from 6.7 9 nm due 750 ~810 °C, while it nearly unaffected variation. In summary, our study documents CVD can be tune microstructural nanolamellae as well coatings’ morphology.