Superior oxidation resistance, mechanical properties and residual stresses of an Al-rich nanolamellar Ti0.05Al0.95N coating prepared by CVD

摘要: Abstract The influence of microstructure on thermal and oxidation properties Ti1-xAlxN hard coatings is not fully understood. In this work, an Al-rich Ti0.05Al0.95N coating with a unique self-organized alternating soft hexagonal (w) AlN cubic (fcc) TiN nanolamellae synthesized by low-pressure chemical vapor deposition (CVD) process analyzed in terms resistance, phase stability, hardness as well residual stresses. Multiple samples metal substrates were oxidized ambient air for 1 h at temperatures the range 700–1200 °C. Exceptionally good resistance up to 1050 °C was found, whereas above 1100 °C localized surface degradation caused substrate–air interaction very characteristic oxide blisters observed. A about 29 GPa remained all unaffected areas 1050 °C. This interpreted specific lamellae that retained nanocomposite character even after partly decomposed during annealing. Depth-resolved stress characterization performed cross-sectional X-ray nanodiffraction as-deposited revealed strong compressive gradient − 2 GPa which homogenized but still annealing Finally, it demonstrated dense responsible superior behavior high stresses coating.