Three-dimensional image measuring apparatus
作者： Kwang-Ill Koh , Eun-Hyoung Seong , Moon-Young Jeon
DOI:
关键词:
摘要: The present invention relates to a three-dimensional image measuring apparatus comprising: an XYZ shaft transfer means mounted onto base member; work stage the member, for moving object position and thereafter supporting it having predetermined reference surface set at side thereof; obtaining in which is moved toward X,Y Z shafts by means, scans grating frequency of N times supported fixed stage, obtains changed times; light emitting generating with wavelength; control unit irradiates generated from receives obtained thereby producing image.
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