Systemic diagnostics for increasing wafer yield
作者： Rohit Kapur , Mallika Kapur , Maya Kapur
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摘要: A method of performing systemic diagnostics for a wafer includes selecting design manufacturability (DFM) rule analysis. For each IC chip on the wafer, two sets features adjacent can be extracted based chip's layout design. Upconverted run to generate computed numbers associated with combination categories set. Zonal analysis using derive metrics sets. report generated zonal
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