Systems and methods for a pressure sensor having a two layer die structure

作者: Gregory C. Brown

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摘要: Systems and methods for a pressure sensor are provided, where the comprises housing having high side input port that allows media to enter of low when is placed in an environment containing media; substrate mounted within housing; stress isolation member substrate; die stack sensing circuitry bonded member; atomic layer deposition (ALD) applied surfaces, substrate, member, stack, exposed port; ALD port.

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