Compensated semiconductor pressure sensor

摘要: A semiconductor pressure sensor compatible with fluid and gaseous media applications is described. The includes a capsule having die silicon cap that bonded to the die. diaphragm incorporates piezoresistive sensors thereon, stress isolation mechanism for isolating from packaging mounting stresses. cavity allowing deflect. further port hermetically attached may be incorporated into plastic housing. In one embodiment, form an integral reference. alternative second provided gage or differential measurements. technique incorporating also An ASIC optionally cap, and/or active electronic circuitry fabricated on cap. Additional coatings applied enhancing chemical resistance.