Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications

Journal of Vacuum Science and Technology,2014, 引用: 7

Materials Chemistry and Physics,2015, 引用: 7

,2015, 引用: 0

Journal of Physics D,2016, 引用: 1

Surface & Coatings Technology,2017, 引用: 25

Applied Physics A,2017, 引用: 15

Thin Solid Films,2018, 引用: 10

Optical and Quantum Electronics,2018, 引用: 0

Small,2019, 引用: 50

arXiv: Materials Science,2016, 引用: 4