Temperature-controlled chuck and method for controlling the temperature of a substantially flat object
作者： John G. Maltabes , Karl E. Mautz , Alain B. Charles
DOI:
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摘要: The present invention generally relates to a method for controlling the temperature of substantially flat object and temperature-controlled chuck comprising body (20) having an support side (21) back (22). Said holds (1) front (2) (3) on said (1). A plurality sensing elements (4) is distributed measure distribution individual influencing (6; 8; 9) face (1), each being arranged influence partial area object's as desired.
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