Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers

摘要: Substrate temperature control apparatus and electronic device manufacturing systems provide pixelated light-based heating to a substrate in process chamber. A holder the chamber may include baseplate. The baseplate has top surface that have plurality of cavities grooves connected cavities. Optical fibers be received such each cavity respective optical fiber terminating therein transfer light thereto. Some or all an epoxy diffuser disposed diffuse provided by fiber. ceramic plate upon which placed bonded thermal spreader optionally between plate. Methods controlling across system are also provided, as other aspects.