Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods
作者： Matthew Busche , Michael R. Rice , Wendell Boyd , Vijay D. Parkhe , Leon Volfovski
DOI:
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摘要: Substrate temperature control apparatus including groove-routed optical fibers. includes upper and lower members grooves in one or both, a plurality of fibers routed the grooves. In embodiment, are adapted to provide light-based pixelated heating. another embedded sensors measurement. systems, electronic device processing methods fiber measurement described, as numerous other aspects.
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