Chamber lid heater ring assembly
作者： Michael N. Grimbergen , Alan H. Ouye , Keven Kaisheng Yu , Graeme Scott
DOI:
关键词: Heating element 、 Base (geometry) 、 Core (manufacturing) 、 Plasma processing 、 Ring (chemistry) 、 Structural engineering 、 Composite material 、 Materials science 、 Planar 、 Electrical conductor
摘要: Embodiments of the invention generally provide a lid heater for plasma processing chamber. In one embodiment, assembly is provided that includes thermally conductive base. The base has planar ring shape defining an inner opening. further heating element disposed on base, and insulated center core across opening
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