Test wafer with optical fiber with Bragg Grating sensors
作者： William J. O'banion , Huy D. Nguyen , An-dien Nguyen
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摘要: An apparatuses relating generally to a test wafer, processing chambers, and method monitoring or calibrating chamber, are described. In one such an apparatus for there is platform. optical fiber with Fiber Bragg Grating sensors located over the A layer of material platform fiber.
lens.org 参考文章(100)
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