A reproducing kernel particle method for meshless analysis of microelectromechanical systems

作者: N. R. Aluru

DOI: 10.1007/S004660050413

关键词:

摘要: Many existing computer-aided design systems for microelectromechanical require the generation of a three-dimensional mesh computational analysis microdevice. Mesh requirements microdevices are very complicated because presence mixed-energy domains. Point methods or meshless do not mesh, and can be performed by sprinkling points covering domain A corrected smooth particle hydrodynamics approach also referred to as reproducing kernel method is developed here applications. correction function that establishes consistency stability derived. simple combining constraint elimination Lagrange multiplier technique imposition boundary conditions. Numerical results shown static dynamic microswitches electromechanical pressure sensors. The accuracy established comparing numerical obtained with previously reported experimental data.

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