Analysis and Fabrication of Curved Multimorph Transducers That Undergo Bending and Twisting
作者： Sagnik Pal , Huikai Xie
DOI: 10.1109/JMEMS.2012.2203104
关键词:
摘要: Difference in strains the layers of a multimorph beam causes it to curl, thereby leading transduction. Straight beams have been widely used for thermal, piezoelectric, and shape-memory-alloy-based transducers that undergo out-of-plane bending, but curved not explored much. In this paper, we report thermal based on multimorphs nonzero curvature plane substrate. The distinguishing feature is they both bending twisting deformations. We small-deformation analysis multimorphs. analytical expressions greatly expand design space microelectromechanical systems engineers can lead novel devices, including micromirrors infrared sensors. closed-form were validated against finite-element (FE) simulation experimental results. Experimental verification was done by monitoring electrothermal at different temperatures. Good agreement between experiments has observed range. At large deformations, in-plane displacement becomes significant. FE simulations are study
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