Design and fabrication of twisting-type thermal actuation mechanism for micromirrors

摘要: Abstract This paper reports the design and fabrication of a novel micromirror actuation system. The actuating mechanism for driving combines two paralleled bimorph actuators bending in opposite directions rotational control micromirror. Each actuator is structured by nickel silicon nitride thin-films. Based on thermal structural analyses, geometry system optimized to achieve larger tilting angles micromirrors whose sizes are order 100 × 100 μm2. Operation shows total vertical displacements about 90 μm 28° 150 × 150 μm2 size at input powers 170 mW 60 μm 20° 80 × 80 μm2 60 mW, which agree well with predictions from theoretical models simulations using commercial code.