Dielectric charging effects in floating electrode MEMS capacitive switches
作者： L. Michalas , M. Koutsoureli , E. Papandreou , F. Giacomozzi , G. Papaioannou
DOI: 10.1016/J.MICROREL.2015.07.024
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摘要: Abstract The paper presents a study oriented to the understanding of floating electrode role on charging characteristics RF MEMS capacitive switches. Identical devices with and without have been stressed under induced mode. Biases different levels polarities were applied transmission line. Reduced asymmetric, respect bias polarity, effects obtained compared conventional ones. results contribute towards conclusion that use in conjunction appropriate actuation polarity may reduce thus improving device lifetime.
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