Nano electromechanical resonator
作者： Michael L. Roukes , Sotirios K. Masmanidis , Rassul B. Karabalin
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摘要: A nanoelectromechanical systems (NEMS) device and method for using the provide a movable member that includes region of low conductivity over which an electric field is developed. width within factor ten (10) thickness NEMS device. The formed between junction incorporates piezoelectric material. first voltage applied across alters active portion thereby adjusting movement induced by second voltage. to produce strain on region. results in defined member.
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lens.org 参考文章(5)
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