Micron-sized mechanical oscillators created by 3D two-photon polymerization: Towards a mechanical logic device

摘要: The goal of this project is to explore the possibilities fabricating mechanical logic devices. A macroscopic model shows idea and feasibility concept. Two-photon polymerization chosen fabricate required complex three-dimensional devices on a length scale less than 100@mm. writing process characterized by evaluating test structures written single laser lines. Complex MEMS resonators were fabricated electrodes for actuation sensing implemented. first concept fabrication mixer are shown.