Recent advances in two-photon 3D laser lithography with self-Q-switched Nd:YAG microchip lasers
作者： Patrice L. Baldeck , Prem Prabhakaran , Chao-Yuan Liu , Michel Bouriau , Laetitia Gredy
DOI: 10.1117/12.2030152
关键词:
摘要: We review our recent results towards the development of a turnkey 3D laser printer, based on self-Q-switched microchip Nd:YAG lasers, with reproducible sub-100nm resolution, and large-scale (cm) fast-speed (cm/sec) capability at micron resolution. First all, we report line fabrication 70nm lateral, 150nm longitudinal resolutions without significant shrinking. This is due to tight focusing green visible wavelength, large numerical aperture, excellent resin properties. Secondly, two-photon sensitive photoacid generators that lead efficient microfabrication epoxy SU-8 resin. Thirdly, demonstrate high-speed scale, millimeter size, scaffolds cemtimeter height needle high repetition rate (130Khz), average power (1W) amplified laser. Finally induced cross-linking antibodies determine type red blood cells in microfluidic channels.
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