Investigation of the optimal processing parameters for picosecond laser-induced microfabrication of a polymer–ceramic hybrid material
作者： E Käpylä , S Turunen , J Pelto , J Viitanen , M Kellomäki
DOI: 10.1088/0960-1317/21/6/065033
关键词: Laser power scaling 、 Laser beam machining 、 Femtosecond 、 Maskless lithography 、 Scanning electron microscope 、 Laser 、 Materials science 、 Optics 、 Fabrication 、 Microfabrication
摘要: This paper reports the effect of different process parameters on resolution direct laser writing by two-photon polymerization (2PP) with a low-cost Nd:YAG picosecond laser. Microstructures were fabricated from hybrid polymer–ceramic material Ormocomp® and impact varying beam focus position, average power scanning speed investigated in detail electron microscopy atomic force imaging. With appropriate settings, suspended structures could be fabricated. The intensity range so-called window damage zone are reported along for producing uniform polymer lines. It is shown that very high achievable this affordable 2PP system feature sizes comparable to those previously costly femtosecond systems. discovered relationships between structure dimensions enable design fabrication both 3D microstructures nanometer scale surface features.
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