Investigation of three-dimensional pattern collapse owing to surface tension using an imperfection finite element model
作者： Sang-Hu Park , Kwang Ho Kim , Tae Woo Lim , Dong-Yol Yang , Kwang-Sup Lee
DOI: 10.1016/J.MEE.2007.08.003
关键词:
摘要: … of neo-conceptive 3D micro-devices in the near future. However despite the powerful merits of TPP… If the shape factor of a 3D structure is higher than others, it has strong possibility to be …
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sci-hub.se 参考文章(19)
Xiaoning Jiang, V. K. Varadan, V. V. Varadan, Microstereolithography and other Fabrication Techniques for 3D MEMS ,(2001)
Sang-Hu Park, Tae-Woo Lim, Dong-Yol Yang, Jun-Ho Jeong, Ki-Don Kim, Kwang-Sup Lee, Hong-Jin Kong, Effective fabrication of three-dimensional nano/microstructures in a single step using multilayered stamp Applied Physics Letters. ,vol. 88, pp. 203105- ,(2006) , 10.1063/1.2204448
Tae Woo Lim, Sang Hu Park, Dong-Yol Yang, Contour offset algorithm for precise patterning in two-photon polymerization Microelectronic Engineering. ,vol. 77, pp. 382- 388 ,(2005) , 10.1016/J.MEE.2005.01.022
Tae Woo Lim, Sang Hu Park, Dong-Yol Yang, Tuan Anh Pham, Dong Hoon Lee, Dong-Pyo Kim, Sung-Il Chang, Jun-Bo Yoon, Fabrication of three-dimensional SiC-based ceramic micropatterns using a sequential micromolding-and-pyrolysis process Microelectronic Engineering. ,vol. 83, pp. 2475- 2481 ,(2006) , 10.1016/J.MEE.2006.05.010
Hong-Bo Sun, Tomokazu Tanaka, Satoshi Kawata, Three-dimensional focal spots related to two-photon excitation Applied Physics Letters. ,vol. 80, pp. 3673- 3675 ,(2002) , 10.1063/1.1478128
Dong-Yol Yang, Sang Hu Park, Tae Woo Lim, Hong-Jin Kong, Shin Wook Yi, Hyun Kwan Yang, Kwang-Sup Lee, Ultraprecise microreproduction of a three-dimensional artistic sculpture by multipath scanning method in two-photon photopolymerization Applied Physics Letters. ,vol. 90, pp. 013113- ,(2007) , 10.1063/1.2425022
J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, M. Popall, Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics. Optics Letters. ,vol. 28, pp. 301- 303 ,(2003) , 10.1364/OL.28.000301
Toshihiko Tanaka, Mitsuaki Morigami, Nobufumi Atoda, Mechanism of Resist Pattern Collapse during Development Process Japanese Journal of Applied Physics. ,vol. 32, pp. 6059- 6064 ,(1993) , 10.1143/JJAP.32.6059
Sang Hu Park, Sang Ho Lee, Dong-Yol Yang, Hong Jin Kong, Kwang-Sup Lee, Subregional slicing method to increase three-dimensional nanofabrication efficiency in two-photon polymerization Applied Physics Letters. ,vol. 87, pp. 154108- ,(2005) , 10.1063/1.2103393
Péter Galajda, Pál Ormos, Complex micromachines produced and driven by light Applied Physics Letters. ,vol. 78, pp. 249- 251 ,(2001) , 10.1063/1.1339258