Three-dimensional microfabrication by use of single-photon-absorbed polymerization
作者： Shoji Maruo , Koji Ikuta
DOI: 10.1063/1.126742
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摘要: We developed a promising method to fabricate three-dimensional microstructures by using single-photon-absorbed polymerization confined the vicinity of tightly focused spot. This localized is based on nonlinear response photopolymerizable resin optical intensity with sufficiently low exposure. The was verified measuring exotherm at different light intensities. proposed enables us make even movable without any supporting parts or sacrificial layers normally required conventional micromachining. In experiment reported here, we fabricated microgear an external diameter 47 μm and attached shaft.
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