Micro-layered-photolithography for Micro-Fabrication and Micro-Molding
作者： J.-Y.-H. Fuh , S. C. H. Thian , Han Tong Loh , Y. Tang , Yeow Sheong Wong
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摘要: … The single-layer photolithography experiments showed that certain photopolymers could be applied for the 3D microfabrication, and solid layers with sharp shapes could be formed …
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