Light-driven MEMS made by high-speed two-photon microstereolithography
作者： S. Maruo , K. Ikuta , K. Hayato
DOI: 10.1109/MEMSYS.2001.906611
关键词:
摘要: Freely movable microstructures were made by use of high-speed two-photon microstereolithography with 200 nm resolution. In our method, are fabricated fast scanning an ultrashort-pulsed near-infrared laser beam through the inside a liquid photocurable polymer. Since method does not require sacrificial etching processes normally used in major micromachining such as surface and LIGA process, fabrication process can be drastically simplified. addition, driven means laser-scanning micromanipulation, because resultant transparent to visible near infrared light. experiments, micromechanisms microgear micromanipulators successfully focused beam. Such light-driven micromechanism should developed into various microdevices applicable microfluidics, chemistry biochemistry.
sci-hub.se 参考文章(11)
Shoji Maruo, Koji Ikuta, Three-dimensional microfabrication by use of single-photon-absorbed polymerization Applied Physics Letters. ,vol. 76, pp. 2656- 2658 ,(2000) , 10.1063/1.126742
K. Ikuta, S. Maruo, T. Fujisawa, A. Yamada, Micro concentrator with opto-sense micro reactor for biochemical IC chip family. 3D composite structure and experimental verification international conference on micro electro mechanical systems. pp. 376- 381 ,(1999) , 10.1109/MEMSYS.1999.746858
Shoji Maruo, Osamu Nakamura, Satoshi Kawata, Three-dimensional microfabrication with two-photon-absorbed photopolymerization. Optics Letters. ,vol. 22, pp. 132- 134 ,(1997) , 10.1364/OL.22.000132
K. Wise, K Najafi, Microfabrication techniques for integrated sensors and microsystems Science. ,vol. 254, pp. 1335- 1342 ,(1991) , 10.1126/SCIENCE.1962192
Shoji Maruo, Koji Ikuta, Fabrication of freely movable microstructures by using two-photon three-dimensional microfabrication Proceedings of SPIE, the International Society for Optical Engineering. ,vol. 3937, pp. 106- 112 ,(2000) , 10.1117/12.382800
S.Maruo S.Maruo, Tadahiro Hasegawa, T.Adachi T.Adachi, K.Ikuta K.Ikuta, T.Hasegawa T.Hasegawa, Fluid Drive Chips Containing Multiple Pumps and Switching Valves for Biochemical IC Family - Development of SMA 3D micro pumps and valves in leak-free polymer package - Proceedings of 13th IEEE International Micro Electra Mechanical Systems Conference (MEMS'00), 2000-1. pp. 739- 744 ,(2000)
Arthur Ashkin, James M Dziedzic, John E Bjorkholm, Steven Chu, None, Observation of a single-beam gradient force optical trap for dielectric particles Optics Letters. ,vol. 11, pp. 288- 290 ,(1986) , 10.1364/OL.11.000288
S. Maruo, S. Kawata, Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 7, pp. 411- 415 ,(1998) , 10.1109/84.735349
K. Ikuta, K. Hirowatari, Real three dimensional micro fabrication using stereo lithography and metal molding international conference on micro electro mechanical systems. pp. 42- 47 ,(1993) , 10.1109/MEMSYS.1993.296949
J.M. Bustillo, R.T. Howe, R.S. Muller, Surface micromachining for microelectromechanical systems Proceedings of the IEEE. ,vol. 86, pp. 1552- 1574 ,(1998) , 10.1109/5.704260