Gas laser oscillator
作者： Toshikuni Shinohara , Hiroshi Ohsawa , Masaki Hirayama , Tadahiro Ohmi , Nobuyoshi Tanaka
DOI:
关键词:
摘要: An excimer laser gas in a tube 2 is excited by microwave introduced from awaveguide 1, and electric field concentration occurs slit-shaped gap 3 provided plate member 11c, causing plasma discharge. Then the phase of light regulated resonated, to cause light. This construction realizes excitation entirely uniform along lengthwise direction emission, enables emission with minimum energy loss.
lens.org 参考文章(3)
Nobuyoshi Tanaka, Tadahiro Ohmi, Masaki Hirayama, Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube ,(1997)
Leonard Epp, Clad P. Christensen, Ronald W. Waynant, Laser pumped by X-band microwaves ,(1982)
Hubert Grosse-Wilde, Wolfgang Kruger, Gas lasers, in particular co2 lasers ,(1990)