Quartz Sensor Measurement for N$_{2}$–H$_{2}$ Plasmas
作者： Atsushi Suzuki , Shuichi Asahina
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摘要: N2–H2 plasmas, which are used for plasma nitriding, were investigated using a quartz sensor (Q-sensor), by gas analysis, and optical emission spectroscopy (OES). The results of Q-sensor measurement showed the production NH3 in related to analysis quadrupole mass spectrometer. On other hand, OES signals from H, N2, Fe, where Fe was material electrode. It is concluded that can detect composition plasmas better than generated surface sputtering, applicable diagnosis nitriding process.
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