Bulk acoustic wave resonator
作者： Moon Chul Lee , Jea Shik Shin , Duck Hwan Kim , Sang Uk Son , In Sang Song
DOI:
关键词:
摘要: Disclosed is a bulk acoustic wave resonator (BAWR). The BAWR includes resonance unit with first electrode, second and piezoelectric layer. layer disposed between the electrode electrode. An air edge formed at distance from center of unit.
google.de 参考文章(148)
Robert L. Benenati, Branko Avanic, Integrated tunable resonators for use in oscillators and filters ,(1992)
Chris Feng, John Choy, Dariusz Burak, Phil Nikkel, Acoustic resonator having guard ring ,(2012)
Dariusz Burak, Alexandre Shirakawa, John Choy, Philip G Nikkel, Acoustic resonator comprising collar and frame ,(2013)
Yosuke Mizuyama, Shogo Matsubara, Hideaki Horio, Film bulk acoustic resonator and film bulk acoustic resonator circuit ,(2004)
Moon Chul Lee, Jea Shik Shin, Sang Uk Son, Ho Soo Park, Jing Cui, In Sang Song, Chul Soo Kim, Duck Hwan Kim, Bulk acoustic wave resonator and manufacturing method thereof, and radio frequency device using bulk acoustic wave resonator ,(2012)
Chi Shun Lo, Chengjie Zuo, Changhan Yun, Sanghoon Joo, Jonghae Kim, Combined resonators and passive circuit components for filter passband flattening ,(2011)
Jiansong Liu, Masanori Ueda, Kenya Hashimoto, Shinji Taniguchi, Tokihiro Nishihara, Piezoelectric thin-film resonator and filter ,(2006)
Kevin J. Grannen, Carrie A. Rogers, John Choy, Piezoelectric resonator structures having temperature compensation ,(2009)
Takao Noguchi, Kenji Inoue, Hisatoshi Saito, Film bulk acoustic wave resonator ,(2005)
Tokihiro Nishihara, Masanori Ueda, Motoaki Hara, Masafumi Iwaki, Takeshi Sakashita, Tsuyoshi Yokoyama, Shinji Taniguchi, Piezoelectric thin film resonator, filter, communication module and communication device ,(2012)