Method of making a phosphorus glass passivated transistor

摘要: PHOSPHOSILICATE GLASS IS INCORPORATED AS A STABILIZER IN THE PASSSIVATING OXIDE ON SURFACE OF DIFFUSED PLANAR BIPOLAR TRANSISTOR BY (1) DRIVING BASE DIFFUSION OXYGEN FOR TIME LESS THAN THAT REQUIRED TO COMPLETE DIFFFUSION, (2) DEPOSITING OXIDIZED TRANSISTOR, (3) PROTECTIVE SILICON DIOXIDE COATING PYROLYSIS SILANE, SIH4, GLASS, AND THEN (4) DENSIFYING AN AMBIENT SUFFICIENT DRIVE-IN STEP.