Large Area Imaging by Fourier Transform Holography Using Soft and Hard X-rays
作者： Naoki Awaji , Kenji Nomura , Shuuichi Doi , Shinji Isogami , Masakiyo Tsunoda
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摘要: We studied a new method for large area imaging by Fourier transform holography in both soft and hard X-ray regions. In region, magnetic domain image of the perpendicular magnetized film was observed 8 µm at an energy 778 eV. applied to observe artificially patterned sample 7 cross-section Cu-interconnect-line, 5500 The spatial resolution, estimated from 10 90% intensity change, 42 75 nm eV, respectively.
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