Optically controlled mems switch and method of using the same
作者： Eric William Fiveland , Joseph Alfred Iannotti , William Chester Platt
DOI:
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摘要: The present embodiments are directed towards the optical control of switching an electrical assembly. For example, in embodiment, package is provided. generally includes a micro electromechanical systems (MEMS) device configured to interface with assembly, MEMS being operable vary assembly between first state and second state, driver communication produce high voltage logic from signal, detector signal produced by light source response applied current-based signal.
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