作者: Coln Michael C W , Hecht Bruce A , Schirmer Mark , O'donnell Alan , Sheeran James Thomas
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摘要: Optically isolated micromachined (MEMS) switches and related methods are described. The optically MEMS described herein may be used to provide isolation between electronic devices. For example, the of types can enable use separate grounds receiving device control circuitry. Isolation high-voltage signals power supplies achieved by using an optical isolator a switch, where controls state switch. In some embodiments, utilizing isolators high voltages, need for electric sources such as charge pumps removed, thus removing cause potential damage device. one switch co-packaged on same substrate.