Making waves: Kinetic processes controlling surface evolution during low energy ion sputtering

作者: Wai Lun Chan , Eric Chason

DOI: 10.1063/1.2749198

关键词:

摘要: … Studying the pattern formation behavior can provide new insights into the fundamental … control surface evolution. For instance, the diffusion of defects and their interaction with surface …

参考文章(250)
S. Facsko, H. Kurz, T. Dekorsy, Energy dependence of quantum dot formation by ion sputtering Physical Review B. ,vol. 63, pp. 165329- ,(2001) , 10.1103/PHYSREVB.63.165329
M. Feix, A. K. Hartmann, R. Kree, J. Muñoz-García, R. Cuerno, Influence of collision cascade statistics on pattern formation of ion-sputtered surfaces Physical Review B. ,vol. 71, pp. 125407- ,(2005) , 10.1103/PHYSREVB.71.125407
F. Montalenti, R. Ferrando, Jumps and concerted moves in Cu, Ag, and Au(110) adatom self-diffusion Physical Review B. ,vol. 59, pp. 5881- 5891 ,(1999) , 10.1103/PHYSREVB.59.5881
M. V. Ramana Murty, A. J. Couture, B. H. Cooper, A. R. Woll, J. D. Brock, R. L. Headrick, Persistent layer-by-layer sputtering of Au(111) Journal of Applied Physics. ,vol. 88, pp. 597- 599 ,(2000) , 10.1063/1.373703
W. Jäger, K. L. Merkle, Defect-cluster formation in high-energy-density cascades in gold Philosophical Magazine. ,vol. 57, pp. 479- 498 ,(1988) , 10.1080/01418618808204681
Henri Hansen, Alex Redinger, Sebastian Messlinger, Georgiana Stoian, Yudi Rosandi, Herbert M. Urbassek, Udo Linke, Thomas Michely, Mechanisms of pattern formation in grazing-incidence ion bombardment of Pt(111) Physical Review B. ,vol. 73, pp. 235414- ,(2006) , 10.1103/PHYSREVB.73.235414
B. Kahng, H. Jeong, A.-L. Barabási, Quantum Dot and Hole Formation in Sputter Erosion Applied Physics Letters. ,vol. 78, pp. 805- 807 ,(2001) , 10.1063/1.1343468
E. S. Tok, S. W. Ong, H. C. Kang, Dynamical scaling of sputter-roughened surfaces in 2+1 dimensions. Physical Review E. ,vol. 70, pp. 011604- ,(2004) , 10.1103/PHYSREVE.70.011604
Tomaso Aste, U Valbusa, Ripples and Ripples: from Sandy Deserts to Ion-Sputtered Surfaces New Journal of Physics. ,vol. 7, pp. 122- 122 ,(2005) , 10.1088/1367-2630/7/1/122
John J. Vajo, Robert E. Doty, Eun‐Hee Cirlin, Influence of O+2 energy, flux, and fluence on the formation and growth of sputtering‐induced ripple topography on silicon Journal of Vacuum Science and Technology. ,vol. 14, pp. 2709- 2720 ,(1996) , 10.1116/1.580192