Ordering of Ga Nanodroplets by Low-Energy Ion Sputtering
作者： Sabina Koukourinkova , Zhiming M. Wang , Jiang Wu , Xingliang Xu , Mourad Benamara
DOI: 10.1007/978-1-4614-9472-0_5
关键词: Quantum dot 、 Sputtering 、 Optoelectronics 、 Surface roughness 、 Materials science 、 Substrate (electronics) 、 Nanotechnology 、 Ion beam 、 Semiconductor 、 Molecular beam epitaxy 、 Focused ion beam
摘要: Ordered nanostructures have attracted much attention due to their potential in realizing novel device applications. In this chapter, we present a study of ordered nanodroplets fabricated by low-energy ion sputtering on GaAs surfaces. The morphological evolution (001) surface exposed Ga+ focused beam was investigated as function energy, incidence, current, sputter time, and dwell time. yield the target, roughness, amount material deposited surface, temperature substrate were evaluated. experimental results show formation self-assembled Ga metal droplets. Control over size, density, ordering droplets is possible for various sets parameters. arrays application templates well local nanosource molecular epitaxy fabricating semiconductor structures such quantum dots.
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